Pakupanga ma wafer a semiconductor, njira ya lithography ndi gawo lofunika kwambiri, loyendetsedwa bwino lomwe limatsimikiza kuchuluka kwa ma chip. Monga "chinthu chofunikira kwambiri pakuwonekera ndi kujambula" mu njira yopangira ma wafer, lithography imaphatikizapo ntchito yonse - kuphatikiza kupindika kwa spin, kuwonekera, chitukuko, kupukuta, ndi kuyeretsa konyowa - ndipo imapanga zofunikira kwambiri pa ukhondo wa chilengedwe, kuwongolera kuipitsidwa, chitetezo chamagetsi, ndi kukana mankhwala. Tinthu ta fumbi tomwe tili mu micron, kusamuka kwa ma ion, ndi kutulutsa kwamagetsi kwanthawi yochepa zonse zimatha kuyambitsa zolakwika za photoresist, kusalinganika bwino kwa mawonekedwe, kusungunuka kwa ma wafer, ndi ma micro-short circuits m'ma circuits, zomwe zimapangitsa kuti ma wafers onse achotsedwe ndikupangitsa kuti zinthu ziwonongeke kwambiri. Ma FAB ambiri amavutika kukonza kuchuluka kwa njira zawo zojambulira. Ngakhale zida, njira, ndi magawo azachilengedwe zonse zili bwino, vuto nthawi zambiri limakhala muzinthu zodzitetezera m'manja zomwe sizikuwoneka ngati zazing'ono. Magolovesi a Ordinary Class 1,000 kapena magolovesi oyeretsa a mafakitale sali oyenera miyezo yapamwamba kwambiri ya njira yojambulira.
N’chifukwa Chiyani Kugwiritsa Ntchito Magolovesi Oyera Kawirikawiri N’koletsedwa Kwambiri Mu Njira Yogwiritsira Ntchito Lithography?
Zotsalira za ufa zimayambitsa kuipitsidwa ndi photoresist
Ma ayoni ambiri a sulfure ndi chloride amawononga ma circuits pa ma wafers
Magetsi osasinthasintha analephera kulamulira, zomwe zinachititsa kuti chidebe choyezera kuwala cha photolithography chiwonongeke
Kusweka ndi kutayika kwa zinthu, zomwe zimapangitsa kuti zinthu zakunja zisawonongeke pakupanga
Magolovesi a LjieClean Class 100 Opanda Ufa a Nitrile
Suzhou Leader ikuyang'ana kwambiri pa gawo lopanga ma wafer a semiconductor ndi kuthana ndi mavuto omwe amabwera chifukwa cha njira ya lithography, tapanga magolovesi apadera a nitrile a Class 100 opanda ufa, otsika mpweya omwe amakwaniritsa bwino zofunikira pakupanga njira yonse ya wafer lithography, zomwe zimapangitsa kuti akhale zida zodzitetezera zomwe zimagwiritsidwa ntchito kwambiri pamakampani ambiri opanga ma wafer ndi ma wafer.
1. Njira Yopanda Ufa Yochokera ku Dichloride: Palibe Kuipitsidwa kwa Ufa mu Njira Yopangira Photolithography
Pogwiritsa ntchito njira yoyeretsera chlorination ya semiconductor-specific, njira iyi siifuna kuwonjezera zina zowonjezera monga talc, cornstarch, kapena silicone oil panthawi yonseyi. Imatsimikizira kuti ikugwiritsidwa ntchito bwino kudzera mu ndondomeko yokha, kuchotsa tinthu ta ufa ndi zotsalira za mafuta a silicone zomwe zimadetsa photoresist pamalo omwe akuchokera, motero kuthetsa kwathunthu zolakwika za tinthu tachilendo mu njira ya photolithography.
2 Kutsuka madzi oyera kwambiri m'magawo ambiri kumachepetsa sulfure, chlorine yochepa, komanso ma ion ochepa
Kudzera m'machitidwe ambiri otsuka mozama ndi madzi oyera kwambiri, zowonjezera ndi zotsalira za pamwamba zimachotsedwa. Kuchuluka kwa sulfure, chlorine, ndi ma ayoni achitsulo osungunuka kumayendetsedwa mosamala, zomwe zimapangitsa kuti NVR ikhale yochepa (zotsalira zosasinthasintha). Izi zimaletsa kukhuthala kwa wafer, dzimbiri lophimba, ndi zolakwika zokoka, zomwe zimapangitsa kuti magolovesi azigwirizana mokwanira ndi njira zovuta zojambulira za ma wafer a mainchesi 8 ndi 12.
Chitetezo cha ESD Chosinthidwa cha Mu Mold Choteteza Ma Wafer Omwe Amamva Kupweteka kwa Magetsi
Mosiyana ndi magolovesi oletsa kugwedezeka omwe amapezeka m'masitolo okhala ndi zokutira kwakanthawi, Gonars imagwiritsa ntchito ukadaulo wosintha woletsa kugwedezeka womwe umagwiritsidwa ntchito mu nitrile base material. Izi zimapangitsa kuti pamwamba pakhale kukana kokhazikika komanso kofanana, kuwononga magetsi osasunthika nthawi zonse kuti apewe kusungunuka kwa magetsi komwe kungayambitse kuwonongeka kwa photoresist ndikuwononga ma wafer circuits olondola. Ndi yoyenera pa njira zowunikira monga kufalikira ndi chitukuko.
4 Yosinthasintha komanso Yoyenera Kugwira Ntchito Molondola pa Micron-Level
Chovala cha magolovesichi n'chosinthasintha ndipo chimagwirizana ndi mawonekedwe a dzanja. Chili ndi kapangidwe kosaterera pa zala za munthu, ndi chopepuka komanso chosakulirapo, zomwe zimapangitsa kuti chikhale choyenera kuchita zinthu molondola monga kugwiritsira ntchito wafer ya photolithography, kukonza zolakwika pazida, komanso kuyang'anira bwino. Chimapereka kuyenda kopanda malire komanso chimaletsa kutsetsereka, zomwe zimathandiza kuchepetsa kuwonongeka komwe kumachitika chifukwa cha kuphulika mwangozi panthawi yogwira ntchito ndi manja. Kuphatikiza apo, sichimalimbana ndi zosungunulira za photolithography ndi ma acid ofatsa ndi alkali, ndipo chimakhala cholimba popanda kukalamba kapena kung'ambika ngakhale mutagwiritsa ntchito nthawi yayitali.
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✅ Mapaketi otsekedwa ndi vacuum okhala ndi zigawo ziwiri amachotsa kuipitsidwa kwina
Zinthu zomalizidwa zimapakidwa mu chipinda chotsukira cha Class 100 pogwiritsa ntchito phukusi lotsekedwa ndi vacuum-sealed, lomwe limachotsa fumbi ndi chinyezi panthawi yosungira ndi kunyamula. Palibe kuipitsidwa kwina mukatsegula phukusi, zomwe zimapangitsa kuti ligwiritsidwe ntchito nthawi yomweyo m'zipinda zotsukira za Class 100.
Nthawi yotumizira: Julayi-23-2026