Magolovesi a Lijiejing Otsika a Chloroprene a mainchesi 9: Muyezo Watsopano Woteteza Zoyera pa Kupanga Ma Semiconductor

Poganizira zofunikira kwambiri pakupanga ma semiconductor, magolovesi a Lijie a mainchesi 9 okhala ndi chlorine yochepa akhala zida zodzitetezera zofunika kwambiri pakupanga ma wafer ndi ma chip pazigawo chifukwa cha kuchepa kwa ayoni komanso magwiridwe antchito abwino. Kudzera mu kukonza kwapadera, kuchuluka kwa chlorine mu magolovesi kumawongoleredwa mosamala pa ≤50ppm—kuposa muyezo wamakampani wa 100ppm. Izi zimaletsa bwino kuopsa kwa dzimbiri komwe kumachitika chifukwa cha kusamuka kwa ma ion a chloride pamalo a ma wafer, kukwaniritsa zofunikira zolimba za opanga ma semiconductor kuti azitha kuwongolera kuipitsidwa ndi microscopic.

Pa nthawi ya lithography, ukhondo wa magolovesi umakhudza mwachindunji kulondola kwa utoto wa photoresist komanso zotsatira zake. Chopangidwa m'zipinda zoyera za Class 100,000 ndipo chimachotsedwa fumbi la laser, mankhwalawa amawonetsa kutulutsa tinthu tating'onoting'ono pamwamba pa tinthu tating'onoting'ono tosakwana 0.2/sikweya mainchesi—kukwaniritsa miyezo ya ISO Class 3 cleanroom. Izi zimaletsa bwino kumamatira kwa tinthu tating'onoting'ono ku malo a wafer, motero zimachepetsa zolakwika za lithography. Kapangidwe kake ka mainchesi 9 kamapereka kuphimba kwathunthu kuyambira padzanja mpaka padzanja. Kuphatikiza ndi kapangidwe ka cuff kosalala, kumatsimikizira kusinthasintha kwa magwiridwe antchito pomwe kumaletsa kutayikira kwa fumbi potsegula chikwama, kukwaniritsa zofunikira zolimba za malo oyera osinthika mu njira za lithography.

Pa nthawi yomwe magolovesiwa amagwiritsa ntchito zinthu zowononga kwambiri monga kupukutira ndi kuyika ma ion, magolovesiwa amasonyeza kukana kwapadera kwa mankhwala. Pambuyo poyesa kumiza kwa maola 24 mu ma reagents ofanana a semiconductor monga hydrofluoric acid ndi phosphoric acid, sawonetsa kutupa kapena kusweka, ndi kusintha kwa kulemera komwe kumakhala pansi pa 0.8%. Izi zimapereka chitetezo chodalirika cha dzanja kwa ogwiritsa ntchito pomwe akuchotsa zoopsa za kuipitsidwa kwa magolovesi chifukwa cha kuwonongeka kwa magolovesi. Zala zake zimakhala ndi mawonekedwe oletsa kutsetsereka a laser a 0.02mm, zomwe zimawonjezera kukangana ndi 35% mukamagwira ma wafers a mainchesi 12 ndikuchepetsa chiopsezo cha kutsetsereka kwa wafer ndi 60%. Izi zimapangitsa kuti pakhale mgwirizano pakati pa chitetezo choteteza komanso kukhazikika kwa ntchito.

Pakadali pano, magolovesi awa ali ndi ziphaso zovomerezeka motsatira miyezo ya SEMI F57, ndipo amagwiritsidwa ntchito popanga zinthu zambiri m'mafakitale akuluakulu kuphatikiza SMIC ndi Hua Hong Semiconductor. Amachepetsa kuchuluka kwa zinyalala za wafer zomwe zimachitika chifukwa chogwirana ndi manja ndi 38%, zomwe zimapangitsa kuti akhale chisankho chabwino kwambiri popanga zinthu za semiconductor kuti azitha kuteteza zipinda zoyera ndi magwiridwe antchito.